Polysilicon Process Details
01. TCS Synthesis and STC Separation
Mixed Silane gas is generated by reacting MG-Si and HCl. Through a distillation process, STC(Silicontetrachloride:SiCl4) is separated.
02. TCS Refining
TCS (Trichlorosilane: SiHCl3) produced in the TCS synthesis process is refined to become pure TCS.
03. CVD(Deposition)
Pure TCS is put into a bell-jar type reactor to decompose at high temperature through CVD(Chemical Vapor Deposition), and rod-shaped Polysilicon is produced. Mixed gas generated in this process is separated by each component and reused.
04. Crushing and Packaging
The harvested silicon rods are crushed into various forms such as chunks and chips and packed and shipped.